Method for integrated circuit mask fabrication and assembly used therewith

ABSTRACT

A METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION. AFTER THE INTEGRATED CIRCUIT HAS BEEN DESIGNED, THE MASKS FOR MAKING THE INTEGRATED CIRCUITS ARE PREPARED BY PREPARING A NUMBER OF NEGATIVES AND POSITIVES FROM THE CIRCUIT WHICH HAS BEEN DESIGNED. EACH OF THE NEGATIVES OR POSITIVES IS MODIFIED BY PASTE-INS, CUT-OUTS, INK-INS OR ERASURES TO PROVIDE ON THE NEGATIVE OR THE POSITIVE THE PATTERN FOR THE PARTICULAR MASK DESIRED. IN THE METHOD, NO CRITICAL DIMENSION NEED BE ADHERED TO FOR MODIFYING THE NEGATIVES OR POSITIVES BECAUSE EACH NEGATIVE IS AUTOMATICALLY RELATED TO THE OTHER. ALL CRITICAL PERIMETERS OR LOCATION EDGES FOR THE CIRCUIT ARE ACCURATELY REPRODUCED IN ACCORDANCE WITH THE ORIGINAL FROM WHICH THE NEGATIVE OR POSITIVE WAS PREPARED. THE LINES WHICH FORM THE CIRCUIT ARE WIDE ENOUGH SO THAT NON-CRITICAL HAND PASTE-INS, INK-INS, ERASURES AND THE LIKE CAN BE UTILIZED. EACH MODIFIED NEGATIVE IS CONVERTED TO A POSITIVE. THESE POSITIVES AND ANY CONVERTED POSITIVES CAN THEN BE PHOTOGRAPHED BY THE USE OF A CONVENTIONAL REDUCTION AND STEP AND REPEAT PROCESSES TO PROVIDE THE ACTUAL MASKS WHICH ARE UTILIZED IN FABRICATING INTEGRATED CIRCUITS.

June 13, 1972 D. KLEITMAN EI'AL 3,669,566

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Flled Dec. 8, 1969 21 Sheets-Sheet l Fig.2

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Ournur INVENTORS' David Kleitman BY Lewis K. Russell 71110:: B.G'rellglzg f morneys [Zinn- F i g. IA

June 13, 1972 D. KLEITMAN ETA]- 3,659,666 METHOD FOR INTEGRATED CIRCUITMASK FABRICATION AND ASSEMBLY USED THEREWITH Fllea Dec. 8, 1969 21Sheets-Sheet z and m NA 3 a ETAL D. KLEITMAN ED CIRCUI AND ASSEMBLY USEDTHER June 13, 1972 T MASK FABRICATION EWITH METHOD FOR INTEGRAT FlleQDec. 8, i969 21 Sheets-Sheet 5 5 m 1w 0 e m m n U n 0 B n ms A Na m k GMm m-MMI? de l DLA. m

June 13, 1972 KLElTMAN ETAL METHOD FOR INTEGRATED CIRCUIT MASKFABRICATION AND ASSEMBLY USED THEREWITH 21 Sheets-Sheet 4 Flled Dec.

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I-NVENTORE Davie] Kleitman BY K Russell 5 Again B. re Iefiig m fAfiorneys June 13, 1972 D. KLEITMAN ETAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Flled Dec. 8, 1969 21 Sheets-Sheet 5 JFN a Q i3 U3 L5 g 1 .ILL E %4/ David K/JQEYF BY Lewis K Russell JA/ar B. Greabgee MMflorneysJune 13, 1972 KLElTMAN ETAL 3,669,666

CIRCUI METHOD FOR INTEGRATED T MASK FABRICATION A TH ND ASSEMBLY USEDTHEREWI Fllec Dec. 8, 1969 21 Sheets-Sheet 6 For Mas: I

For MAS #3 Fig II rib!" MAS/4 #4 A INVENTORS David K/eitman By Lewis K.Russell 7 [on B. zGreaegi,

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Attorneys June 13, 1972 Filed Dec. 8, 1969 June 13, 1972 METHOD FORINTEGRATED CIRCUIT MASK FABRICATION Flled Dec. 8, 1969 D. KLEITMAN ET AL,AND ASSEMBLY USED THEREWITH 21 Sheets-Sheet 8 QR K2 5 9 U3 LL 1 Lu F i1 s Q g Dam-J Kle jn ff i Lewis K. Russell on B Gr Lane :1 ,W 91.1, Mmtorneys June 13, 1972 0. KLEITMAN EIAL 3,669,666 METHOD FOR INTEGRATEDCIRCUIT MASK FABRICATION AND ASSEMBLY USED THEREWITH I969 21Sheets-Sheet 9 Y N S w LN Q l- E U Q 5 9 E i- 5 -0: '5 N D D 01 KO 1* qZ Lu 0 N m g 8 J g 8 o I o 5 I a LL :0 E 3 5 1 LL .L.L

A T Q Q %g I z 9 LL! In 2 j 1-!- g Q 3 69 LL 0 GD INVENTORS l)av1'aK/eitman Attorneys June 13, 1972 n. KLEITMAN EI'AL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Fllea Dec. 8, 1969 21 Sheets-Sheet 10 Fig. I7 Fig.I7A D?K; m

BY Lewis K Russell 5 210,11 B. relfirz jg 9 Aflorneys June 1972 D.KLEITMAN E 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Fllec Dec. 8, 1969 21 Sheets-Sheet 11 Fig. I8

INVENTORS Davie! Kleitman BY Lou/is K. Russell June 13, 1972 D- KLElTMANEFAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Fllefl Dec. 8, 1969 21 Sheets-Sheet 12 INVENTORS DavidK/eiiman BY Lewis K. Russell IO" B G? Len 3 246, my? W Attorneys June13, 1972 KLEITMAN ETAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Filea Dec. 8, 1969 21 Sheets-Sheet 15 INVENTORS F Dam'aK/eitman Lewis K. Russell (:ZAian B. Greljweggj Attorneys June 13, 1972KLEITMAN ETAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWIIH F'lled Dec. 8, 1969 21 Sheets-Sheet 14 Fig.2!

ZNVENTORS David Kleviman BY Lewis K. Russel,

Bzgrebefu M June 13, 1972 1 ETAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Filed Dec. 8, 1969 21 Sheets-Sheet l5 L A INVENTORS F- F M s 2David Kleitman I Lewis K. Russell Alan B. GT2 ene June 13, 1972 KLEITMANETAL 3,669,655

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Filea Dec. 8, 1969 21 Sheets-Sheet l6 NVENTORS F i DavidKlei'tman BY Liam's K Russell 5711 or}: B. zregalew M 9 Attorneys June13, 1972 KLEITMAN EIAL 3,669,656

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Filed Dec. 8, 1969 21 Sheets-Sheet 1'7 INVENTORS DaniaKieiiman Afiorneys june 13, 1972 KLEITMAN ETAL 3,669,666

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION AND ASSEMBLY USEDTHEREWITH Fllecl Dec. 8, 1969 21 Sheets-Sheet l8 /02 8 a For Mask 4- /6INVENTOR5 David K/eitman BY Lewis K. Russeii June 13, 1972 KLEITMAN ETAL3,669,665

METHOD FOR INTEGRATED CIRCUIT MASK FABRICATION 'AND ASSEMBLY USEDTHEREWITH Filecl Dec. 8, 1969 21 Sheets-Sheet 19 F i g. 29A (MMH) 3 Fi295 W Fig. 51

W w Attorneys D. KLEITMAN ET AL METHOD FOR INTEGRATED CIRCUIT MASKFABRICATION Filed D80. 8, 1969 Fig. 34

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METAL MA SK AND ASSEMBLY USED THEREWITH 21 Sheets-Sheet 2O Fig.55

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